Break-away positioning conveyor mount for accommodating conveyor belt bends

ABSTRACT

A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

This application is a division of and claims priority to United StatesNon-Provisional patent application Ser. No. 10/987,955, filed Nov. 12,2004, which claims priority to U.S. Provisional Patent Application Ser.No. 60/520,049, filed Nov. 13, 2003. Both of these patent applicationsare incorporated herein by reference in their entirety.

CROSS REFERENCE TO RELATED APPLICATIONS

The present application is related to the following commonly-assigned,co-pending U.S. patent applications, each of which is herebyincorporated herein by reference in its entirety for all purposes:

U.S. patent application Ser. No. 10/650,310, filed Aug. 28, 2003 andtitled “System For Transporting Substrate Carriers” (Attorney Docket No.6900);

U.S. patent application Ser. No. 10/650,312, filed Aug. 28, 2003 andtitled “Method and Apparatus for Using Substrate Carrier Movement toActuate Substrate Carrier Door Opening/Closing” (Attorney Docket No.6976);

U.S. patent application Ser. No. 10/650,481, filed Aug. 28, 2003 andtitled “Method and Apparatus for Unloading Substrate Carriers fromSubstrate Carrier Transport Systems” (Attorney Docket No. 7024);

U.S. patent application Ser. No. 10/650,479, filed Aug. 28, 2003 andtitled “Method and Apparatus for Supplying Substrates to a ProcessingTool” (Attorney Docket No. 7096);

U.S. Provisional Patent Application No. 60/407,452, filed Aug. 31, 2002and titled “End Effector Having Mechanism For Reorienting A WaferCarrier Between Vertical And Horizontal Orientations” (Attorney DocketNo. 7097/L);

U.S. Provisional Patent Application No. 60/407,337, filed Aug. 31, 2002,and titled “Wafer Loading Station with Docking Grippers at DockingStations” (Attorney Docket No. 7099/L);

U.S. patent application Ser. No. 10/650,311, filed Aug. 28, 2003 andtitled “Substrate Carrier having Door Latching and Substrate ClampingMechanism” (Attorney Docket No. 7156);

U.S. patent application Ser. No. 10/650,480, filed Aug. 28, 2003 andtitled “Substrate Carrier Handler That Unloads Substrate CarriersDirectly From a Moving Conveyor” (Attorney Docket No. 7676);

U.S. patent application Ser. No. 10/764,982, filed Jan. 26, 2004 andtitled “Methods and Apparatus for Transporting Substrate Carriers”(Attorney Docket No. 7163);

U.S. patent application Ser. No. 10/764,820, filed Jan. 26, 2004, andtitled “Overhead Transfer Flange and Support for Suspending SubstrateCarrier” (Attorney Docket No. 8092);

U.S. Provisional Patent Application No. 60/443,115, filed Jan. 27, 2003,and titled “Apparatus and Method for Storing and Loading Wafer Carriers”(Attorney Docket No. 8202/L);

U.S. Provisional Patent Application No. 60/520,180, filed Nov. 13, 2003,and titled “Calibration of High Speed Loader to Substrate TransportSystem” (Docket No. 8158/L); and

U.S. Provisional Patent Application No. 60/520,035, filed Nov. 13, 2003,and titled “Apparatus and Method for Transporting Substrate CarriersBetween Conveyors” (Docket No. 8195/L).

FIELD OF THE INVENTION

The present invention relates generally to systems for fabricatingelectronic devices, and is more particularly concerned withtransportation of substrate carriers within a fabrication facility.

BACKGROUND OF THE INVENTION

Prior art systems for conveying articles (e.g., workpieces such assubstrates, or workpiece containers such as substrate carriers or FOUPs)through a transport path within a fabrication facility may include acradle upon which conveyed articles may be loaded. Such systems stop atdifferent process tools to load or unload substrate carriers from thecradles or tools as needed. Typically the cradles come to rest and arobotic arm using an end effector removes a carrier from a cradle orloads a carrier on a cradle.

In prior art systems where the cradle pivots freely on the conveyor oris otherwise allowed to move on the conveyor belt, the orientation ofthe carrier may be determined by, for example, a controller of therobotic arm when the carrier is removed. However, such systems are notsuitable to be used as a continuously moving, high-speed conveyor systemdue to the time it may take for the carrier to stop rotating (orotherwise moving), the time it may take to determine the carrierorientation, and the time required to remove the carrier from thecradle.

In prior art conveyor systems where the cradle is rigidly mounted to theconveyor, the conveyor system may be designed to tolerate the stressesthat the cradle and the conveyor exert on each other as the cradle ismoved through turns on the transport path. Such systems may be designedto function for at least a minimum acceptable time before the inherentstresses result in a failure of a component of the system. Such systemsthus require regular maintenance to replace fatigued parts. Thus, suchsystems are not suitable to be used as a continuously moving, high speedconveyor system because of the maintenance requirement.

Therefore, systems and methods are needed to mount cradles to conveyorsthat are suitable for use in continuously moving, high speed transportsystems.

SUMMARY OF THE INVENTION

In a first aspect of the present invention, a break-away mounting systemfor a continuous-motion, high-speed position conveyor system isprovided. A support cradle may be suspended from a conveyor belt suchthat the support cradle maintains a fixed position and orientationrelative to at least one point on the conveyor belt without inducingappreciable stress on the conveyor belt, the support cradle, or thecoupling between the conveyor belt and the support cradle. The mount mayinclude a leading rotatable bearing attached to the support cradle whichmay releasably engage a first key attached to the conveyor belt, therotatable bearing being adapted to accommodate rotational forces appliedto the support cradle by the conveyor belt. The mount may also include aslide bearing attached to the support cradle which may releasably engagea second key attached to the conveyor belt, the slide bearing beingadapted to accommodate longitudinal forces applied to the support cradleby the conveyor belt.

In a second aspect, a method is provided that includes driving aconveyor belt continuously along a transport path having at least onebend and suspending a support cradle from the conveyor belt such thatthe support cradle maintains a fixed position and orientation relativeto at least one point on the conveyor belt without inducing appreciablestress on the conveyor belt, the support cradle, or a coupling betweenthe conveyor belt and the support cradle.

In a third aspect, an apparatus is provided that includes a conveyorbelt and a support cradle mounted on the conveyor belt via a couplingadapted to accommodate rotational forces and a coupling adapted toaccommodate longitudinal forces.

In a fourth aspect, an apparatus is provided that includes a conveyorbelt, a mounting location on the conveyor belt including at least twokeys, and a support including at least a rotatable bearing and a slidebearing that are adapted to engage either key. The support may bemounted on the conveyor belt at the mounting location by engaging thekeys with the bearings.

In a fifth aspect, an apparatus is provided that includes a cradle, arotatable bearing attached to the cradle, and a longitudinal bearingattached to the cradle. The bearings may be adapted to mount to aconveyor belt such that the orientation of a substrate carrier supportedby the cradle remains known and consistent relative to the conveyorbelt.

In a sixth aspect, an apparatus is provided that includes a conveyorbelt and a plurality of keys attached to the conveyor belt. The keys maybe adapted to engage a rotatable bearing and/or a longitudinal bearing.The keys may be identical to each other and may be adapted to engageboth a rotatable bearing and a longitudinal bearing at different times.Different keys may be used with different bearings.

In a seventh aspect, a conveyed substrate carrier is longitudinallylocated at a longitudinal location of a conveyor belt (the meaningaccorded herein to the term ‘longitudinal location’ being specificallydiscussed below), while inertial loads arising in the conveyed substratecarrier are distributed along multiple longitudinal locations of theconveyor belt. In at least one embodiment, this may reduce the potentialfor fatigue within the conveyor belt.

In an eighth aspect, a coupling interface is provided between a conveyorbelt and a cradle of a positioning conveyor, wherein the couplinginterface includes a coupling element adapted during ordinary use tolongitudinally locate the cradle on a longitudinal location of theconveyor, and when urged by a frontal impact force of a predefinedmagnitude, to permit the cradle to deflect away from the longitudinallocation. In at least one embodiment, this permits the cradle, as wellas any conveyed article supported by the cradle, to become dislodgedfrom the conveyor belt.

Other features and aspects of the present invention will become morefully apparent from the following detailed description of exemplaryembodiments, the appended claims and the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic illustration of an exemplary conveyor belt whichmay be employed in a positioning conveyor system according toembodiments of the present invention.

FIG. 2 is a schematic end view of an exemplary conveyor belt which maybe employed in a positioning conveyor system according to embodiments ofthe present invention.

FIG. 3 is a schematic side view of an exemplary conveyor belt which maybe employed in a positioning conveyor system according to embodiments ofthe present invention.

FIG. 4 is a schematic top view of an exemplary conveyor belt which maybe employed in a positioning conveyor system according to embodiments ofthe present invention.

FIG. 5 is a partial top view of an exemplary positioning conveyor systemaccording to embodiments of the present invention.

FIG. 6 is a cross-sectional end view of an exemplary conveyor belt whichmay be employed in a positioning conveyor system according toembodiments of the present invention.

FIG. 7 is a partial cross-sectional top view of a positioning conveyor,which is an embodiment of the positioning conveyor of FIGS. 2-4.

FIG. 8 is a partial cross-sectional top view of an exemplary positioningconveyor according to embodiments of the present invention.

FIG. 9 is a downward, perspective view of an exemplary positioningconveyor according to embodiments of the present invention.

FIGS. 10A and 10B are perspective views of an example of a portion of aconveyor belt according to embodiments of the present invention.

FIG. 11 is a perspective view of an example embodiment of a keyaccording to embodiments of the present invention.

FIG. 12 is a perspective view of an example embodiment of a cradleincluding a rotatable support bearing and a longitudinal slide supportbearing according to embodiments of the present invention.

FIGS. 13A through 13D include perspective, side, front, and top views(respectively) of the example rotatable support bearing of FIG. 12depicted with the example key of FIG. 11 according to embodiments of thepresent invention.

FIGS. 13E through 13H include perspective, side, front, and top views(respectively) of the example rotatable support bearing of FIG. 12depicted without a key according to embodiments of the presentinvention.

FIGS. 14A through 14D2 include perspective, side, front, top, and secondtop views (respectively) of the example longitudinal slide supportbearing of FIG. 12 depicted with the example key of FIG. 11 according toembodiments of the present invention.

FIGS. 14E through 14H include perspective, side, front, and top views(respectively) of the example longitudinal slide support bearing of FIG.12 depicted without a key according to embodiments of the presentinvention.

FIG. 15 is a perspective view of an exemplary cradle including examplesof alternative support bearings according to embodiments of the presentinvention.

DETAILED DESCRIPTION

Overhead transport (OHT) systems for moving substrates betweenprocessing tools within an electronic device manufacturing facility maybe designed to operate continuously at high-speeds and without requiringstopping for maintenance as described, for example, in previouslyincorporated U.S. patent application Ser. No. 10/650,310, filed Aug. 28,2003, and titled “System For Transporting Substrate Carriers” (AttorneyDocket No. 6900). The conveyors used in such applications preferably aredesigned so that forces that may fatigue the conveyors or otherwise wearthe conveyors are minimized to a level that is not appreciable (e.g. toprevent significant fatigue or wear). In addition, it is preferable tomaintain the cleanliness of electronic device manufacturing facilitiesto minimize the possibility that substrates processed within suchfacilities become contaminated.

The present invention provides methods and apparatus for securelymounting a support (e.g., a cradle) for holding substrate carriers,including small lot carriers, on a conveyor belt suitable for use in anOHT system. The present invention also facilitates precise positioningof the carriers as they are transported so that processing tools andother devices may reliably locate or remove carriers being transportedby the conveyor, and add carriers to the conveyor without stopping theconveyor. In addition, the support mounting methods and apparatus of thepresent invention minimize both the forces exerted on the conveyor andany particle generation that may result from such forces. This may beachieved in some embodiments by mounting each cradle support on theconveyor using a mount having two (or more) minimized points of contactsuch that both rotational and longitudinal (e.g., along the length ofthe conveyor) forces exerted on the mount by the conveyor as it bends(on its path through the electronic device manufacturing facility) maybe accommodated by the mount while not affecting the position of themount on the conveyor.

In some embodiments, the methods and apparatus of the present inventionmay employ a mount that simultaneously uses two different couplings tomount a single substrate carrier support onto a conveyor. The firstcoupling may accommodate rotational forces applied to the mount by theconveyor as the conveyor bends through turns on a transport path. Insome embodiments, the first coupling may include a substrate carriersupport bearing rigidly attached to the support and adapted to berotatably carried by a first vertical dowel or key rigidly attached tothe conveyor. The second coupling, which may employ a second verticaldowel or key rigidly attached to the conveyor, may accommodatelongitudinal forces applied to the mount by the conveyor as it bends andthe distance between the two keys decreases.

In one or more embodiments, the second coupling may include a supportbearing, such as a longitudinal slide bearing, rigidly attached to thesubstrate carrier support and adapted to provide a channel within whichthe second vertical dowel or key rigidly attached to the conveyor isfree to move longitudinally while carrying the substrate carriersupport. In some embodiments, one or more additional couplings may beused for a given support.

In alternate and/or additional embodiments, the couplings may be“break-away” couplings. In other words, if the support (or a substratecarrier held by the support) unexpectedly encounters an obstruction, thecouplings may be designed to controllably release the support such thatthe amount of force applied to the conveyor via the mount as a result ofthe collision is limited to a predetermined amount of break-away forcethat will not damage the conveyor (and/or a substrate carrier beingtransported by the conveyor). In some embodiments, the bearing of thefirst coupling may be a clip bearing that rotatably attaches to thedowel but releases the dowel if more than the predetermined amount ofbreak-away force is applied in the longitudinal direction. Since thesecond coupling does not restrict the movement of the support in thelongitudinal direction, the second coupling may be designed to releasethe support by having the slide bearing limited in length to the minimumlength required to accommodate the sharpest (e.g., smallest radius)bends that the conveyor will normally be required to accommodate. Thus,mounts that use break-away couplings according to the present inventionmay prevent the conveyor from stopping or being damaged in the case of acollision between supports (or substrate carriers suspended from thesupports) mounted on the conveyor and other objects.

As used herein, the term substrate may refer to any type of substrate,mask, reticule, other device, and/or other material that may betransported within a carrier about an electronic device manufacturingfacility (e.g., a semiconductor wafer, glass plate, polymer substrate,etc.).

As used herein, the term “small lot size” carrier or “small lot” carriermay refer to a carrier that is adapted to hold significantly fewersubstrates than a conventional “large lot size” carrier which typicallyholds thirteen or twenty-five substrates. As an example, a small lotsize carrier may be adapted to hold five or less substrates. In someembodiments, other small lot size carriers may be employed (e.g., smalllot size carriers that hold one, two, three, four or more than fivesubstrates, but significantly less than that of a large lot sizecarrier). In general, each small lot size carrier may hold too fewsubstrates for human transport of carriers to be viable within asemiconductor device or other manufacturing facility. Note that thepresent invention may employ either small lot size carriers and/or largelot size carriers.

Also, as used herein, the terms “cradle” and “support” may be synonymousand may refer to a device capable of submitting to, reacting to and/ortransmitting a variety of forces, and/or of performing a variety offunctions related to article conveyance. A cradle may have an extendedlongitudinal aspect (e.g., along the length of a straight portion of aconveyor belt), and may be subjected to drive forces (e.g., of constantand/or variable speed), as well as positive and negative acceleration,in a direction substantially aligned with its extended longitudinaldimension. Also, while being longitudinally driven (e.g., rotated)and/or accelerated, such a cradle may be subjected to vertically and/orlaterally-oriented guide forces which tend to confine the longitudinallymoving support to a predefined travel route and orientation. (Thepredefined travel route accordingly may be employed to define thetransport path through which conveyed articles are moved.) In someembodiments, such a cradle may also be adapted to laterally bend (e.g.,deform, flex, deflect, pivot, hinge, articulate, assume a curved aspect,and/or locally expand and/or contract as necessary) so as to conform toone or more lateral turns in the predefined travel route, as well as tostraighten (e.g., reassume a substantially straight shape upon emergingfrom a lateral turn) so as to conform to a substantially straightsegment in the predefined travel route. (When such a lateral turn existsin the travel route, the lateral turn may be considered to define atravel plane within which the cradle may be considered to be rotating.)Such a cradle is generally also employed to bear the weight of conveyedarticles.

A positioning conveyor system according to the present invention may beused to orient or position a carrier relative to a processing tool orstorage station. As the term is used herein, a positioning conveyor is aconveyor that includes an element such as the cradle described above,and that permits a conveyed article to assume a predefined longitudinalposition relative to the cradle (i.e., a specific position along thelongitudinal dimension of the cradle).

The cradle of such positioning conveyors may be required to react in acontrolled fashion (e.g., without experiencing fatigue-producing stress,undue deflection, and/or undue deformation) to inertial loads arisingfrom conveyed articles, especially inertial loads that arise as theconveyed articles pass through lateral turns in the transport path.Accordingly, the present invention provides methods and apparatus forpermitting the cradle and/or cradle mounts of positioning conveyors toeffectively absorb and/or accommodate inertial loads arising fromconveyed articles.

As indicated above, systems for transporting substrate carriers within aelectronic device fabrication facility between storage locations andprocessing stations, and/or between separate processing tools within aelectronic device manufacturing facility, may include conveying systemswherein the conveying system additionally provides for loading andunloading of substrate carriers from the conveyor mounted supportswithout requiring the supports to stop, or even to slow down, during theload or unload processes. For example, such a conveying system isdescribed in previously incorporated U.S. patent application Ser. No.10/650,480, filed on Aug. 28, 2003 (AMAT 7676).

The above-referenced application discloses methods and apparatus forcausing an end effector of a load/unload robot: (1) to substantiallymatch a transport path of a conveyed substrate carrier (e.g., to movealong a line that, as viewed from above, is aligned with a segment of atransport path along which a support or cradle of a conveyor carries asubstrate carrier within a fabrication facility); (2) to substantiallymatch a transport speed of the conveyed substrate carrier while matchingthe transport path (e.g., to move along the line at a speed that isequivalent to the speed at which the cradle of the conveyor carries thesubstrate carrier along the segment of the transport path); (3) tosubstantially match a moving transport position of the conveyedsubstrate carrier while substantially matching the transport path andthe transport speed (e.g., to assume and maintain a moving positionalong the line that, as viewed from above, is aligned with a movingposition occupied by the substrate carrier within the segment of thetransport path); (4) to substantially match a transport elevation of theconveyed substrate carrier while substantially matching the transportpath, the transport speed, and the moving transport position (e.g., torise up from beneath the moving substrate carrier so as to causemounting features of the end effector to address or engage complementaryfeatures of the substrate carrier); (5) to lift the substrate carrieroff of the cradle while continuing to substantially match the transportpath, the transport speed, and the moving transport position; and/or (6)to withdraw the substrate carrier (now no longer being carried by thecradle) away from the conveyor belt and out of the transport path (e.g.,so as to avoid further contact with the rotating element, and to avoidany unintended contact with other moving substrate carriers, or with anyother portions of the conveyor which may be moving with the cradle alongthe travel route).

With regard to such methods and apparatus for removing substratecarriers from a cradle, and specifically with regard to the step (3)described above, it may be advantageous for the conveying system fromwhich the substrate carriers are to be removed to comprise a positioningconveyor, since such conveyors may be used to provide good control overthe longitudinal positioning of conveyed articles. Accordingly, thepresent invention discloses novel methods and apparatus for providingprecise positioning of conveyed articles, and includes further inventiveaspects, including an aspect by which a cradle may be caused to react inan improved manner to inertial forces arising from conveyed substratecarriers, as well as an aspect by which a cradle and conveyed articlesmay be permitted to dislodge from a conveyor when subjected to a frontalor other impact force of a predetermined magnitude, and to do so in acontrolled manner.

Terms

As such terms are used herein, the conveyor belt of a positioningconveyor includes a series of points arranged along the longitudinaldimension of the conveyor belt. Each such point, hereinafter referred toas a longitudinal location of the conveyor belt, occupies/has apredefined position along the longitudinal extent of the conveyor belt(e.g., relative to a structural component of the conveyor belt movablealong the travel route), such that the predefined position of any onelongitudinal location can be shown to be unique as compared to theposition of all other longitudinal locations of the conveyor belt. Aconveyor belt may be of any practicable shape, size, and/or orientation.

Another characteristic of the conveyor belt, is that the conveyor beltis capable of laterally bending (e.g., via flexure, hinging, pivoting,articulation, etc.) between any two such longitudinal locations so as toconform to lateral turns in the travel route. Also, as the term is usedherein, longitudinal location may refer to multiple points on theconveyor belt having the same longitudinal position relative thereto(e.g., wherein the multiple points form an axis and/or a plane, and/orwherein the axis or plane remains in a normal orientation relative tothe local direction of the conveyor belt's travel route). For example, aphysical datum feature or datum surface (e.g., a mounting through hole,a threaded mounting bore hole, a mounting post, a mounting surface, adowel, etc.) formed on or within the conveyor belt, and/or fixedlyattached relative to the longitudinal dimension of the conveyor belt,may resolve to a point, an axis, and/or a plane that partially orcompletely defines a longitudinal location of the conveyor belt.Accordingly, the point, axis, or plane to which such a datum feature orsurface resolves need not necessarily intersect a physical structuralelement of the conveyor belt (e.g., the longitudinal location maycorrespond to the resolved axis of a through hole passing through astructural element of the conveyor belt and having a perpendicularorientation relative to the travel route thereof). Still further, theterm longitudinal location may refer to other points or positions notspecifically described above but which may be shown to be consistentwith the present use of the term.

Not every point along the longitudinal dimension of a given conveyorbelt may be properly encompassed within the term longitudinal location.For example, if the conveyor belt is comprised of a longitudinallyarranged series of links or segments, wherein the links or segmentsthemselves are substantially laterally inflexible (e.g., the linkscannot be made to bend away from a direction of longitudinal extensionto any significant extent), but the conveyor belt is otherwise capableof forming the required lateral bend at or along one or more points ofarticulation between such links (e.g., via flexible contact ornon-contact couplings between the links), in at least one embodiment, nomore than one longitudinal location may be associated with each suchlink.

Conversely, other conveyor belts may comprise a theoreticallypotentially infinite number of distinct longitudinal locations. Forexample, a conveyor belt may comprise at least onelongitudinally-elongated structural component (and/or a longitudinallyarranged series of such components) having a unitary (e.g., continuous)construction in its longitudinal direction of extension that permits thecomponent to exhibit overall dimensional stability in the longitudinaldirection (e.g., the component is both substantially incompressible andsubstantially inextensible therealong), while at the same timepermitting the component to locally flex at essentially any point alongits length so as to permit substantial conformance to the shape oflateral turns in the travel route (some embodiments of such a conveyorbelt may comprise a ribbon or band (e.g., formed from or made of amaterial such as spring stainless steel, polycarbonate, compositematerials (e.g., carbon graphite, fiberglass, etc.), steel or otherwisereinforced polyurethane, polypropylene, epoxy laminates, plastic orpolymer materials that include stainless steel, fabric (e.g., carbonfiber, fiberglass, Kevlar® available from Dupont, polyethylene, steelmesh, etc.) or another stiffening material, etc.) joined at its oppositeends to form a closed loop coinciding with the travel route). Asuccession of very closely spaced longitudinal locations may be imaginedwith regard to such a conveyor belt, since no matter how small thedistance between two longitudinally distinct points along the length ofthe conveyor belt, it is always possible to imagine the existence of anadditional point or points between the two longitudinally distinctpoints at or along which the conveyor belt may form a bend (howeverslight).

Problem to be solved

The notion of longitudinal locations having been at least initiallydiscussed with regard to different types of conveyor belts, it may benow be considered that the interface between a conveyor belt and aconveyed article may be an important part of a system that seeks toprovide positioning of conveyed articles in an accurate, precise, and/orrepeatable manner, e.g., so as to facilitate smooth unloading ofconveyed articles as described above. FIG. 1 schematically illustratesan exemplary conveyor belt which may be employed in the context of aninventive positioning conveyor system. An analysis of the conveyor beltof FIG. 1 may illustrate potential complications related to precisepositioning of conveyed articles. For example, and as will now beexplained, one necessary result of the requirement that the conveyorbelt be capable of bending between any two longitudinal locations isthat the absolute distance between any two longitudinal locations, suchas may be measured within a travel plane defined by such a bend in thetravel route, is capable of variation (e.g., depending on whether at anygiven time a bend in the conveyor belt exists between such longitudinallocations).

FIG. 1 schematically illustrates an exemplary conveyor belt 101, in thatit shows the travel route 103 along which the conveyor belt 101 may becaused to rotate in a longitudinal direction 105, and within which it isconfined. The travel route 103 forms a travel plane (coplanar with theplane of the paper of FIG. 1) via the presence of a lateral turn 107 inthe travel route. The conveyor belt 101 is dimensionally stable alongits longitudinal dimension (i.e., the conveyor belt 101 as a whole isneither compressible nor extensible to any significant extent along thetravel route 103). The conveyor belt includes an exemplary portion 109on which is located a first longitudinal location 111, and a secondlongitudinal location 113 located relatively near the first point on theexemplary portion 109, and upstream of the first point relative to thedirection of travel 105. The conveyor belt 101 is a part of apositioning conveyor 115 (not separately shown), and it shall beinitially considered that a conveyed article (not shown) is to assume apredefined longitudinal position relative to the conveyor belt 101, atleast in part via longitudinal positional guidance provided by theconveyor belt 101 at both the first and second longitudinal locations111, 113 (e.g., the conveyed article is to simultaneously longitudinallylocate on both such longitudinal locations).

While the exemplary portion 109 of the conveyor belt 101 passes along afirst substantially straight segment 117 of the travel route 103, thefirst and second longitudinal locations 111, 113 will remain separatedby a distance represented by a first dimension 119 (as measured withinthe travel plane) which will tend to remain essentially constant. Bycontrast, the distance between the first and second longitudinallocations 111, 113 will foreshorten to a second, smaller distancerepresented by a second dimension 121 whenever the exemplary portion 109of the conveyor belt 101 is passing through the turn 107 in the travelroute 103. Further, and as is also shown in FIG. 1, the originalpoint-to-point distance may be restored, as represented by a thirddimension 123 which is equivalent to the first dimension 119, once theexemplary portion 109 of the conveyor belt 101 emerges from the turn 107and is passing, for example, along a second substantially straightsegment 125 adjacent the turn 107.

Since the absolute distance between the first and second longitudinallocations 111, 113 will tend to vary depending on whether thelongitudinal locations 111, 113 are passing along a straight or curvedsegment of the travel route, to attempt to cause the conveyed article(not shown) to simultaneously locate on both such points on the conveyorbelt 101 may invite one or more of the following complications:

an ambiguity as to the true longitudinal position of the conveyedarticle (not shown) relative to the conveyor belt 101;

problems related to achieving consistent and precise spatialorientations (e.g., as distinct from maintaining a consistentlongitudinal position) for all conveyed articles (not shown); and/or

one or more instances of mechanical interference which may potentiallydamage or deform the conveyor belt 101, the conveyed article (notshown), or other apparatus (not shown) related to providing support forthe conveyed article.

As such, at least for purposes of establishing a precise longitudinalposition for a conveyed article relative to the conveyor belt of apositioning conveyor, it may be advantageous to predetermine/preselect alongitudinal location on which the conveyed article is to locate, ratherthan to rely on multiple longitudinal locations for purposes oflongitudinal positioning. Moreover, the advantages inherent in the useof a longitudinal location for longitudinal positioning may persistregardless of whether the conveyor belt is generally dimensionallystable in the longitudinal dimension (as illustrated in FIG. 1. anddescribed above with regard to FIG. 1), or is not necessarilycharacterized by dimensional stability in the longitudinal dimension(e.g., wherein the conveyor belt may be relatively compressible and/orextensible in the direction of the travel route, and/or may exhibitbacklash between longitudinally adjacent but structurally separatelinks, segments, or components which comprise the conveyor belt).

FIGS. 2 through 4 presuppose that such a positioning conveyor mayinclude article positioning supports interposed between conveyedsubstrate carriers and the rotating element, wherein a first end of eacharticle support permits a substrate carrier to be received by and tobecome positively longitudinally located relative to the articlesupport, and a second end of each article support permits the articlesupport to locate on a predefined longitudinal location of the conveyorbelt.

FIG. 2 is a schematic end view of a positioning conveyor 127 inaccordance with the present invention which may be similar to thepositioning conveyor 115 described above with regard to FIG. 1, exceptinsofar as the positioning conveyor 127 includes a conveyor belt 129that is not necessarily characterized by dimensional stability in thelongitudinal dimension as is the conveyor belt 101 of FIG. 1, and mayhave further characteristics such as are described below. Thepositioning conveyor 127 further comprises an article support 131 (e.g.,the positioning conveyor 127 may comprise multiple instances of such anarticle support 131). The article support 131 receives and supports asubstrate carrier 133 in a manner that permits the substrate carrier 133to positively locate on the article support 131, e.g., in thelongitudinal direction (i.e., into the plane of FIG. 2). The articlesupport 131, in attaching to the conveyor belt 129, preciselylongitudinally locates on a longitudinal location 135 of the conveyorbelt 129, which longitudinal location 135 may be considered essentiallyequivalent to the longitudinal location 111 of FIG. 1. As such, ameasure of the precision with which the article support 131longitudinally locates relative to the conveyor belt 129 may be ‘passedon’ to the conveyed substrate carrier 133 (e.g., to a greater or lesserdegree depending on the relevant properties of the article support 131,(such as stiffness, presence of articulation, degree of articulation,etc. and/or the manner in which the spatial orientation of the articlesupport 131 relative to the conveyor belt 129 is controlled).

FIG. 3 is a schematic side view of a portion 137 of the conveyor belt129 of the positioning conveyor 127 of FIG. 2, including the articlesupport 131, which is longitudinally located on the longitudinallocation 135 of the conveyor belt 129, and the conveyed substratecarrier 133, which is supported by and is longitudinally locatedrelative to the article support 131. The portion 137 of the conveyorbelt 129 may be caused to pass along a substantially straight segment ofa travel route 139 of the conveyor belt 129, thereby causing theconveyed substrate carrier 133 to be moved along a transport path 141.

FIG. 4 is a schematic top view of the positioning conveyor 127 of FIG.2, corresponding to a curved segment 143 of the conveyor belt's travelroute 139 disposed between a first and a second substantially straightsegment 145, 147 thereof. The article support 131, because it islongitudinally located on the longitudinal location 135 of the conveyorbelt 129, may be caused to travel with the conveyor belt 129 along thetravel route 139, e.g., as the conveyor belt 129 passes through thefirst substantially straight segment 145, enters and bends inconformance with the curved segment 143, and enters and straightenswithin the second substantially straight segment 147. The substrateconveyor 133, longitudinally located relative to the article support131, is also generally considered to be longitudinally located on thelongitudinal location 135 by virtue of the article support 131 being solocated.

FIGS. 2, 3 and 4 further respectively illustrate that the conveyor belt129 may be subjected to inertial forces arising within the conveyedsubstrate carrier 133, and/or within a subassembly comprising theconveyed substrate carrier 133 and the article support 131, andtransmitted by the article support 131 in the form of one or moremoments 149, 151, 153 respectively in roll, pitch, and/or yaw. Further,each of FIGS. 2, 3 and 4 illustrate that, in such particular embodimentsof the positioning conveyor 127 wherein force-transmission interactionbetween the article support 131 and the conveyor belt 129 isintentionally confined to the longitudinal location 135 and/or the areaof the conveyor belt 129 immediately adjacent the longitudinal location135, any or all of the above-mentioned moments will tend to act on theconveyor belt 129 in a focused manner, converging on the samelongitudinal location, i.e., longitudinal location 135, requiring theconveyor belt 129 to react accordingly. For example, to the extent theattachment of the article support 131 to the conveyor belt 129 includeslimitations or restrictions in the capacity of the article support 131to rotate relative to (e.g., rotate or swing about) the longitudinallocation 135, the article support 131 may be caused to act in the mannerof a cantilever extending from the conveyor belt 129 to the degree of anoffset between the longitudinal location 135 and the center of gravityof the conveyed substrate carrier 133, and/or of the substratecarrier/article support subassembly. Inertial forces arising within theconveyed substrate carrier 133, because acting through a cantileversupport, may then be passed on to the conveyor belt 129 in the form ofthe moment 149 in roll (FIG. 2), the moment 151 in pitch (FIG. 3),and/or the moment 153 in yaw (FIG. 4), depending on the nature and/ordegree (e.g., complete or partial) of the restraint.

As relates to the discussion of FIG. 5 below, the attachment of thearticle support 131 to the conveyor belt 129 may, for example,incorporate means to enforce a substantially complete restriction in thecapacity of the article support 131 to rotate laterally, i.e., in yaw(see the yaw moment 153 of FIG. 4). For example, a pair of complementaryand mating cylindrical or spherical datum surfaces (not shown) of aninterface apparatus (not shown) may be located at the longitudinallocation 135. One of the pair of datum surfaces may have a fixed spatialand positional (e.g., fixed in a horizontal plane) relationship with theconveyor belt 129, and the other may have the same relationship with thearticle support 131. By carefully ‘positioning’ the datum surfacesrelative to one another, an operator may adjust the yaw orientation ofthe article support 131 so as to cause the article support 131 to becomelongitudinally aligned with the conveyor belt 129, and by virtue of suchalignment, to become longitudinally aligned as well with the travelroute 139 within which the conveyor belt 129 is confined as it rotateslongitudinally. Once the article support 131 has been brought into suchan aligned condition in yaw, the rotational orientation of the datumsurfaces relative to one another may be fixed, such that the articlesupport may be caused to remain in the aligned condition.

Certain embodiments of the positioning conveyor 127 which, as discussedearlier, restrict interaction between the article support 131 and theconveyor belt 129 to the longitudinal location 135, may permit thealigned condition of the article support 131 in yaw relative to thetravel route 139, described immediately above, to persist, whether atany given time the article support 131 is passing through a turn in thetravel route (see the turn 143 of FIG. 4), or through a substantiallystraight segment of the travel route (see the first and secondsubstantially straight segments 145, 147 of FIG. 4). As such, all othervariables being considered to be equal, methods and apparatus forremoving the conveyed substrate carrier 133 from the conveyor belt 129while the conveyor belt 129 is moving, and that require the conveyedsubstrate carrier 133 to assume, and remain in an aligned (or,alternatively, a fixedly offset) yaw orientation relative to the travelroute 139 during removal, may be accommodated with equal facility alongeither turns or substantially straight segments in the travel route 139.

Referring again to FIGS. 2-4, one or more specific embodiments of theconveyor belt 129 may be, for example, of a uniformly (e.g., along thelongitudinal dimension) relatively light weight so as to permit highrotational speeds through turns without inviting the potential forunmanageable inertial forces arising within affected portions of theconveyor belt 129 itself, and/or of a high aspect ratio (such as thevertically-oriented ribbon-type version described above) so as tofacilitate precise application of laterally-oriented guide forces and toenable the conveyor belt 129 to conform to lateral bends in thetransport path. As such, at least one dimension of the conveyor belt 129at the longitudinal location 135 (e.g., a thickness of a continuousribbon formed by the conveyor belt, or a thickness of a link or segmentof the conveyor belt) may be smaller than if the more important designcriteria were a desire to avoid fatigue-producing stress, and/or plasticdeformation, within the conveyor belt 129 in response to one or morelarge transmitted inertial moments from the substrate carrier 133, orfrom the substrate carrier/article support subassembly.

For example, a given embodiment of the conveyor belt 129 may beoptimized in the manner described above (e.g., as to weight, capacity tobe precisely laterally and/or vertically guided, and capacity toprecisely conform to lateral turns in the travel route 139 (FIG. 4)),resulting in a relatively small thickness dimension at the longitudinallocation 135 in a direction 155 that runs transverse or perpendicular tothe travel route 139 (FIG. 4). Also, the given embodiment may also limitforce transmission interaction between the article support 131 and theconveyor belt 129 to the longitudinal location or the immediate vicinitythereof. However, transport circumstances may arise, for example, inwhich such a conveyor belt 129 will be called upon to react to a rollmoment 149 (e.g., which may be applied periodically, i.e., each time theconveyed substrate carrier 133 passes through a portion of the transportpath 141 (FIG. 3) corresponding to the turn segment 143 (FIG. 4) of thetravel route 139) which is disproportionately large. This invites thepossibility of premature damage to the conveyor belt 129 at or in theimmediate vicinity of the longitudinal location 135. Such damage mayoccur, for example, either immediately (e.g., plastic deformation), orover time (e.g., cracks which are created by, and thereafter propagatedby, fatigue from regularly high stress levels).

Depending on the transport application, the variables of the followinglist, may be relevant to whether such a conveyor belt 129 sustainspremature damage due to inertial loading in yaw, pitch, or roll, andespecially in roll (e.g., such as may arise when a conveyed substratecarrier 133 passes through turns in the transport path 141 (FIG. 3) asdefined by similar turns in the travel route 139 (FIG. 4) of theconveyor belt):

the basic inertia of the substrate carrier 133 (which may be relativelyhigh, e.g., in the case of a FOUP adapted to store 25 or moresubstrates) and/or of the substrate carrier/article support subassembly;

the local stiffness and/or strength of the conveyor belt 129 (which maybe relatively low, e.g., because of the design considerations mentionedabove);

the overall stiffness and/or strength of the article support 131 (whichmay be limited in cross-sectional size near the conveyor belt becausethe footprint of a force transmission interface with the conveyor belt129 is limited to the longitudinal location 135);

the speed at which the conveyor belt 129 is rotated along the travelroute 139;

the frequency with which the inertial load is applied (which may berelatively high, due to a high rotation speed and/or the presence ofmany lateral turns in the travel route 139);

the relative size of the radii describing turns in the travel route 139(e.g., in the case of turns with variable radii, an instantaneous radiusvalue, and in the case of turns with constant radii, the value of thatconstant radius);

the total number of substrates which the conveyed substrate carrier 133is capable of storing, as well as the number of substrates stored in aparticular conveyed substrate carrier 133, and the load configuration ofany conveyed substrate carrier 133 containing less than a fullcomplement of stored substrates; and/or

the ‘cantilever’ distance separating a center of gravity of the conveyedsubstrate carrier 133, and/or a resolved center of gravity of asubstrate carrier/article support subassembly, from the longitudinallocation 135 (e.g., the longitudinal (in the case of a yaw moment)and/or vertical (in the case of pitch and roll moments) offset betweenthe center of gravity of the inertial body and the longitudinal location135).

An embodiment of the conveyor belt 129 that is caused to bear, at thesame longitudinal location at which the article support 131 locates, theentirety of all inertial loads arising within the conveyed substratecarrier 133, or within the substrate carrier/article supportsubassembly, may tend to form life-shortening cracks and/or undueelastic or plastic deformation either precisely at the longitudinallocation 135, or within an area of the conveyor belt 129 immediatelyadjacent and/or surrounding the longitudinal location 135.

The consequences of such damage to the conveyor belt 129 may have theeffect of preventing smooth removal of the conveyed substrate carrier133 from the moving conveyor belt 129, especially in circumstances inwhich the conveyor belt 129 must maintain a constant, high speed ofrotation along the travel route 139. As such, methods and apparatus areneeded to permit a conveyor belt 129 to avoid life-shortening levels ofstress at the longitudinal location 135 at which the article support 131locates, while at the same time reliably reacting (e.g., reacting in awell-controlled manner) to inertial loads arising within the conveyedsubstrate carriers 133 and/or the substrate carrier/article supportsubassembly, and continuing to exert precise control over thelongitudinal position and spatial orientation of the article support 131for purposes of smooth at-speed unloading of the substrate carrier 133.

DESCRIPTION OF SPECIFIC EMBODIMENTS OF THE INVENTION

FIG. 5 is a partial top view of a positioning conveyor system 157 inaccordance with the present invention for transporting substrates withina fabrication facility. Referring to FIG. 5, the positioning conveyorsystem 157 includes a substrate carrier 133 (shown in phantom) (thepositioning conveyor system 157 may include multiple instances of such asubstrate carrier 133), and a positioning conveyor 127 a adapted to movethe substrate carrier 133 along a transport path (not separatelyshown-see the transport path 141 of FIG. 3)). The positioning conveyor127 a includes, in the form of a conveyor belt 129 a, an embodiment ofthe conveyor belt 129 of FIGS. 2-4 which has such additional features asare described below, including (like the conveyor belt 101 of FIG. 1)dimensional stability along the longitudinal dimension of the conveyorbelt 129 a. The conveyor belt 129 a is schematically illustrated in FIG.5 in that FIG. 5 shows the travel route 103 along which the conveyorbelt 129 a may be rotated in a longitudinal direction 105, and withinwhich it may be confined by vertical and/or lateral guide equipment (notshown). The travel route 103 forms a travel plane (coinciding with theplane of the paper of FIG. 5) via the presence of a lateral turn 107 inthe travel route 103. The conveyor belt 129 a includes a portion 109 aon which is located a first longitudinal location 111 a, and a secondlongitudinal location 113 a located relatively near the first locationon the a portion 109 a, and upstream of the first location relative tothe direction of travel 105.

Importantly, the positioning conveyor 127 a also includes an articlesupport 131 a, similar to the article support 131 described above, andhaving specific features as described below, among which are features bywhich inertial loads arising from the conveyed substrate carrier 133, orfrom the substrate carrier/article support subassembly (which aretransmitted by the article support 131 a to the conveyor belt 129 a inthe form of moments such as the roll moment 149 of FIG. 2 and/or the yawmoment 153 of FIG. 4) may be distributed among multiple longitudinallocations of the conveyor belt 129 a. For example, the article support131 a may include a support element 159, from which the conveyedsubstrate carrier 133 may be made to depend, as well as a first and asecond interface portion 161, 163 (both shown in cross section), whichmay be coupled to the support element 159, and/or of unitaryconstruction with the support element 159 (hinging arrangements are alsopossible), such that the first and second interface portions 161, 163extend upward from the support element 159, and occupy positions on thesupport element 159 separated by a predefined generally fixed distance(e.g., the distance, though generally fixed, may or may not beadjustable in length). The first and second interface portions 161, 163are adapted to interact in a coordinated fashion with the conveyor belt129 a so as to distribute the above-described inertial loads between thefirst and second longitudinal locations 111 a, 113 a.

The first interface portion 161 is adapted to longitudinally andlaterally locate on the first longitudinal location 111 a (and by doingso, to longitudinally and laterally locate the article support 131 arelative to the conveyor belt 129 a) in a manner that permits thearticle support 131 a to transmit inertial loads in the form of roll andpitch moments to the conveyor belt 129 a via the longitudinal location111 a while permitting the article support 131 a to rotate to somedegree in yaw about the first longitudinal location 111 a (i.e., whereinthe first longitudinal location 111 a may be located at the center ofrotation of the article support 131 a). As such the spatial orientationof the article support 131 a is not completely fixed in yaw relative tothe conveyor belt 129 a, as was the case for certain embodiments of theconveyor belt 129 discussed above with regard to FIGS. 2-4.

The second interface portion 163 is adapted to laterally locate on thesecond longitudinal location 113 a of the conveyor belt 129 a in amanner that permits the article support 131 a to transmit inertialmoments in roll to the conveyor belt 129 a at the second longitudinallocation 113 a without interfering with the longitudinal and laterallocating function of the first interface portion 161 by which thearticle support 131 a derives its longitudinal location relative to theconveyor belt 129 a. Employment of the article support 131 a may thusavoid, among other potential complications, the complications (1)-(3)described above with regard to FIG. 1 having to do with positionalambiguity, mechanical interference, etc., while distributing potentiallydamaging inertial loads along multiple longitudinal locations so as toreduce the potential for localized fatigue due to high stress levels,and/or localized instances of undue flexure in the conveyor belt 129 a.

As the embodiment of the article support 131 a shown in FIG. 5illustrates, the conveyor belt 129 a may comprise a first mountingfeature 165 (shown in cross section), longitudinally and laterallylocated on the first longitudinal location 111 a for interacting withthe first interface portion 161 of the article support 131 a. Forexample, part or all of the first mounting feature 169 of the conveyorbelt 129 a may be of unitary construction with a link (not shown) of theconveyor belt 129 a. Alternatively, or additionally, the first mountingfeature 169 may comprise one or more components separate from theconveyor belt 129 a and coupled to the conveyor belt 129 a at the firstlongitudinal location 111 a.

The first interface portion 161 of the article support 131 a and thefirst mounting feature 165 of the conveyor belt may respectivelycomprise a first datum surface 167 and a second datum surface 169. Thefirst and second datum surfaces 167, 169 may comprise complementarylocating features positioned substantially coaxially and/orconcentrically and adapted to slidably mate so as to permit relativerotation between the two surfaces while the two surfaces are maintainedin contact and/or in close proximity for purposes of good locatingprecision. For example, lateral (e.g., parallel to the paper of FIG. 5)cross sections of the first and second datum surfaces 167, 169 maydescribe partial circles (i.e. one, two or more circle segments) and/orcomplete circles, and the first and second datum surfaces 167, 169themselves may describe complementary partial or complete spherical,conical, cylindrical, and/or otherwise complementary curved orundulatory shapes so as to facilitate relative rotation. The circularcross-sections of either or both of the first or second datum surfaces167, 169 need not necessarily form complete circles, at least sincecomplete (i.e., 360 degree) rotation of either surface relative to theother need not necessarily be provided. Circular segments of differingradii are also possible, provided all such segments are concentric so asto facilitate simultaneous longitudinal and lateral location of thearticle support 131 a relative to the conveyor belt 129 a.

In cases where the second datum surface 169 forms a spherical shape, thesecond datum surface 169 may resolve to a point (not shown) which maycoincide with the longitudinal location 111 a. Also, in cases where thesecond datum surface 169 resolves to an axis (not shown) (e.g., when thedatum surface 169 forms a cylinder, a cone, a curved or undulatoryshape, etc.), the axis to which the second datum surface 169 resolvesmay or may not coincide with the longitudinal location 111 a. If thepoint or axis to which the second datum surface 169 resolves does notcoincide with the longitudinal location 135, a substantially fixedoffset may separate the point or axis from the longitudinal location 135in the longitudinal and/or lateral direction. Coincident or nearlycoincident arrangements in such circumstances may be advantageous inthat they may best serve to limit the overall magnitude of transmittedinertial moments.

As the embodiment of the article support 131 a shown in FIG. 5 alsoillustrates, the conveyor belt 129 a may comprise a second mountingfeature 171 located at the second longitudinal location 113 a forinteracting with the second interface portion 163 of the article support131 a. For example, part or all of the second mounting feature 171 ofthe conveyor belt 129 a may be of unitary construction with the conveyorbelt 129 a. Alternatively or additionally, the second mounting feature171 may comprise one or more components separate from the conveyor belt129 a and coupled to the conveyor belt 129 a at the second longitudinallocation 113 a.

The second interface portion 163 of the article support 131 a maycomprise separate third and fourth datum surfaces 173, 175, spaced apartfrom each other and facing generally toward each other (e.g., ifsubjected to coordinated controlled dimensional tolerancing, they may beconsidered to resolve together to an axis, or a plane disposed betweenthem, as described further below), and the second mounting feature 171of the conveyor belt 129 a may comprise a fifth datum surface 177. Thethird and fourth datum surfaces 173, 175 may be individually adapted(e.g., not necessarily simultaneously) to slidably mate with the fifthdatum surface 177 in a manner that permits both translational androtational motion between pairs of contacting surfaces without loss ofcontact, or if contact is broken, without loss of close proximity. Forexample, a lateral (e.g., parallel to the paper of FIG. 5) cross sectioncutting through the third and fourth datum surfaces 173, 175 maydescribe two lines which are both straight and parallel to each otherand separated by a predefined distance 179, and a lateral cross sectionof the fifth datum surface 177 may describe a partial or complete circleof a diameter slightly smaller than a distance 179 between the twostraight and parallel lines, or may form two or more circular segmentsof the same or differing radii which sum to a total distance slightlysmaller than the distance 179. Either or both of the third and fourthdatum surfaces 173, 175 themselves may be substantially planar (e.g., ifboth planar, they may be substantially parallel to each other), and/ormay form the shape of a curved and/or undulatory line extruded in spacein the longitudinal direction. The third and fourth datum surfaces 173,175, though they may extend in the same generally longitudinaldirection, may or may not be bilaterally symmetrical across a lateralvertically-oriented cross section as viewed in that direction, so longas in lateral horizontally-oriented cross section, the datum surfaces173, 175 appear as substantially parallel lines (as they do in FIG. 5).

The second mounting feature 171 may remain at all times laterally (i.e.,transversely relative to the longitudinal direction of travel 105)‘captured’ between the third and fourth datum surfaces 173, 175 of thesecond interface portion 163 of the article support 131 a (e.g.,simultaneously remaining either in contact with and/or in closeproximity to each of the third and fourth datum surfaces 173, 175),while being free to rotate to some degree relative to the secondinterface portion 163 generally (and the third and fourth datum surfaces173, 175 in particular), and/or translate to some degree in a generallylongitudinal direction along a slot 181 formed by the opposing third andfourth datum surfaces 173, 175. In some embodiments of the secondinterface portion 163, the third and fourth datum surfaces 173, 175,e.g., to the extent they are considered bilaterally symmetrical about acentral plane or axis (not separately shown), may be considered toresolve to a central plane or axis. Such a central plane or axis maydefine a longitudinal direction of the slot 181, and may or may notcoincide with non-planar embodiments of the second longitudinal location113 a.

Consistent with the above-described functions of the positioningconveyor 127 a, embodiments of the positioning conveyor 127 a may beprovided in which either or both of the first or second mountingfeatures 165, 171 also bear the weight of the conveyed substrate carrier133 and/or the substrate carrier/article support subassembly. Forexample, the first and/or second mounting features 165, 171 may featureoutside diameters which taper in a linear manner (e.g., conically)and/or in a non-linear manner (e.g., with a convex or concave aspect)from lower to higher portions thereof (not separately shown), and insidediameters (e.g., in the case of the first interface portion 161) or asurface-to-surface spacing dimension (e.g., in the case of the secondinterface portion 163) of the corresponding interface portion may besimilarly tapered so as to permit the interface portion to settle atopthe mounting feature. In such an arrangement, the height of the articlesupport 131 a may also be set at least partially via such weight-bearinginteraction between one or more pairs of corresponding datum surfaces ofthe mounting features of the rotating element 129 a and the interfaceportions of the article support 131 a such that the article support 131may vertically locate relative to the conveyor belt 129 a.Alternatively, and as will be described below, the corresponding datumsurfaces may not perform weight bearing and/or vertical locationfunctions, and such functions may be performed by separate elementsand/or features (e.g., which may also comprise part of the mountingfeatures and/or the interface portions) not necessarily involved inlongitudinal and/or lateral location of the article support 131 arelative to the conveyor belt 129 a.

FIG. 5 provides sequential illustrations of the a portion 109 a of theconveyor belt 129 a passing (1) along a first substantially straightsegment 117 of the travel route 103, (2) along the turn 107 of thetravel route 103, and (3) along a second substantially straight segment125 of the travel route 103. In a similar manner as is shown anddescribed above with reference to FIG. 1, the absolute distance betweenthe first and second longitudinal locations 111 a, 113 a may foreshortenwithin the turn 107, and be restored within the second substantiallystraight segment 125. The laterally locating interface between thesecond mounting feature 171 of the conveyor belt 129 a and the secondinterface portion 163 of the article support 131 a may account for thisforeshortening and restoration by permitting the second mounting feature171 to advance or retreat within the slot 181 of the second interfaceportion 163 as necessary. For example, after the first longitudinallocation 111 a has entered the turn 107, but while the secondlongitudinal location 113 a remains in the first substantially straightsegment 117, the second mounting feature 171 may be required to advancewithin the slot 181, as may be seen by comparing the first and secondinstances of the exemplary portion 109 of the conveyor belt 129 a shownin FIG. 5. As another example, after the first longitudinal location 111a has exited the turn 107, but while the second longitudinal location113 a remains in the turn 107, the second longitudinal location 113 amay be required to retreat within the slot 181, as may be seen bycomparing the second and third instances of the exemplary portion 109 ofthe conveyor belt 129 a shown in FIG. 5. Presuming the second interfaceportion 163 of the article support 131 a to be of sufficient length, thesecond interface portion 163 may keep the second interface portion 163captive regardless of the relative position of the second longitudinallocation 113 a within the slot 181 (e.g., wherein tighter turns maynecessitate a relatively greater minimum length for the second interfaceportion 163).

The positioning conveyor 127 a of FIG. 5 may be optimized so as toprovide precise alignment of the article support 131 a in yaw relativeto the conveyor belt 129 a along the substantially straight segments117, 125. In this way, it may be used to advantage in conjunction withequipment designed to unload substrate carriers as they move along astraight transport path, such as the load/unload robot described in theabove incorporated 480 patent application. For example, the first andsecond datum surfaces 167, 169 may be cylindrical in shape, and ofsufficient length so as to provide precise overall pitch and rollorientation for the article support 131 a and the conveyed substratecarrier 133. The axis to which the cylindrically shaped second datumsurface 169 resolves may be controlled so as to pass substantiallyvertically through the longitudinal location 111 a, which enables thearticle support 131 a and the conveyed substrate carrier 133 to locateboth longitudinally and laterally on the longitudinal location 111 a.Precise yaw orientation for the article support 131 a relative to thetravel route 103 may accordingly be provided by causing the articlesupport 131 a to become longitudinally aligned with the conveyor belt129 a.

At least three aspects of the article support 131 a may cooperativelyact to provide such longitudinal alignment. In a first aspect, althoughthe capacity of the first interface portion 161 of the article support131 a to rotate about the first mounting feature 165 essentially forgoesthe possibility of positive longitudinal alignment at all points on thetravel route 103, it permits the flexibility needed to permit the firstand second mounting features 165, 171 of the conveyor belt 129 a torotate relative to each other. Such flexibility is needed, for example,to the extent the specific yaw orientation of each of the first andsecond mounting features 165, 171 of the conveyor belt 129 a is fixedrelative to the local tangential direction of travel of the conveyorbelt 129 a (see FIG. 5, in which the direction of the cross-hatching ofeach mounting feature 165, 171 remains aligned with the local directionof the travel route 103, resulting in a difference in yaw orientation asbetween the two mounting features 165, 171 while both are passingthrough the turn 107).

In a second aspect, the second interface portion 163 of the articlesupport 131, by means of its lateral locating and longitudinallytranslating relationship with the second longitudinal location 113 a(e.g., via the second mounting feature 171), permits the second mountingfeature 171 to rotate the article support 131 a relative to (i.e.,about) the first longitudinal location 111 a so as to provide thedesired yaw value. As such, to the extent the conveyor belt 129 a ismade to assume a substantially straight shape, the first and secondlongitudinal locations will be aligned at their maximum point-to-pointdistance along the travel route 103, and the desired position determinedby action of the second mounting feature 171 may thus be repeatable andreliable. In a third aspect, because the article support 131 a itselfhas an extended aspect along the longitudinal dimension of the conveyorbelt 129 a, a precise maximum point-to-point distance between the firstand second longitudinal locations 111 a, 113 a may be selected which isof sufficient length to reduce and/or eliminate any potential errors inyaw which may be introduced by the gap between the outside diameters ofthe mounting features of the conveyor belt 129 a and the insidedimensions of the interface portions of the article support 131 a thatpermit relative rotation therebetween.

Whereas the yaw condition of the article support 131 a relative to thetravel route 103 may be observed to be in flux as the article support131 a enters or exits the turn 107 in the travel route 103 (and/or anyturn in the travel route 103), to the extent the radius of the turn 107is kept constant, the article support 131 a will at least maintain aconstant yaw orientation relative to the travel route 103 while bothlongitudinal locations 111 a, 113 a are passing through the turn. Assuch, the positioning conveyor 127 a may be compatible with aload/unload robot (not shown) adapted to remove the substrate carrier133 while it is passing through turns in a transport path, so long asthe load unload robot is capable of controlling yaw offset to a constantvalue.

Sliding contact between such datum may be encouraged, and generation ofparticles via such sliding contact may be discouraged, by ensuring thatthe surfaces are, and/or remain, smooth. Alternatively and/or inaddition, a material that exhibits low particle generation may beapplied to the datum surfaces so as to encourage smooth sliding with aminimum of particles being generated.

FIG. 6 is a cross-sectional end view of an exemplary embodiment of theconveyor belt 129 a of FIG. 5. As shown in FIG. 6, a belt 183 of theconveyor belt 129 a may have a high aspect ratio providing a relativelybroad extent in the vertical direction, useful for permitting the belt183 to be subjected to high-precision lateral guidance so as to closelyadhere to the travel route 103 (FIG. 4), as well as a relatively narrowextent in the transverse direction, useful for employing the belt 183 todefine a precise travel path 141 (FIG. 3) for a conveyed substratecarrier 133 (FIG. 3). For example, in addition to having a high aspectratio such as is shown in FIG. 6, the belt 183 may also be characterizedby unitary, continuous construction in the longitudinal dimension, inwhich case the narrow extent in the transverse dimension may provide theconveyor belt 129 a the capacity to elastically flex in conformance tolateral turns (see turn 107 in FIG. 5) in the travel route 103 (FIG. 5),as well as to permit a potentially infinite number of patterns andpoint-to-point distances relating to the arrangement of longitudinallocations (e.g., longitudinal locations 111 a, 113 a of FIG. 5) alongthe conveyor belt 129 a.

FIG. 6 also illustrates that a longitudinal location of the conveyorbelt 129 a may comprise multiple points on the belt 183. For example,the first mounting feature 165 a of the conveyor belt 129 a, which maybe cylindrical, and, as also shown in FIG. 6, may have an extendedvertical aspect suitable to provide a desired degree of precision inpitch and roll, may be fastened to the belt 183 at multiple points 185on the belt 183, all of which may occupy the same longitudinal positionrelative to the belt 183 (e.g., they may be aligned along a verticalaxis), such that no foreshortening or restoration of a distance betweensuch points occur by virtue of lateral turns in the travel route 103.The first mounting feature 165 a may also extend below a lowermostextent 184 of the belt 183, e.g., so as to facilitate coupling of anarticle support (not shown) entirely below and/or separate from the belt183. In some embodiments, mounting features may not extend below alowermost extent 184 of the belt 183, e.g., so as to insure clearance ofany objects that may cause the cradle to be decoupled from the mountingfeatures.

FIG. 7 is a partial cross-sectional top view of a positioning conveyor127 b, which is an embodiment of the positioning conveyor 127 of FIGS.2-4, and is similar to the positioning conveyor 127 a of FIG. 5, havingdifferences therefrom as described below which include at least abreakaway feature for the article support. The positioning conveyor 127b may comprise a conveyor belt 129 a similar to that described in FIG.5, wherein the conveyor belt is also partially schematically illustratedin the form of its travel route 103, and comprises a first mountingfeature 165. The positioning conveyor 127 b may further include anarticle support 131 b shown in relevant portion, that portion being afirst interface portion 187 of the article support 131 b. The firstinterface portion 187 may function and have structure similar to thefirst interface portion 161 of FIG. 5, but with certain differences. Forexample, the first interface portion 187 is similar to the firstinterface portion 161 in that it is adapted during ordinary use tolongitudinally and laterally locate the article support 131 b on thefirst longitudinal location 111 a of the conveyor belt 129 a. Onedifference is that the first interface portion 187 may comprise abreakaway connection. For example, when urged by a force 189 (e.g., aforce created by an impact between the article support 131 b passingalong the travel route 103 and a slower object, or a relativelymotionless object, crossing into and/or appearing within the travelroute 103) of a predefined magnitude, e.g., 25 pounds force or more, thefirst interface portion 187 is adapted to permit the article support 131b to deflect away (e.g., in a direction 190 substantially opposite thelongitudinal direction of travel 191 of the conveyor belt 131 b) fromthe first longitudinal location 111 a.

In at least one embodiment of the first interface portion 187, becausethe first interface portion 187 permits the article support 131 b todeflect away from the longitudinal location 111 a, the article support131 b, as well as any conveyed article associated with the articlesupport, may be permitted to become entirely dislodged from the conveyorbelt 129 a. For example, the first interface portion 187 may comprise afirst finger 193 and a second finger 195 extending from a common support196 in different circumferential directions around the first mountingfeature 165 of the conveyor belt 129 a, and the first and second fingers193, 195 may form at least a portion of a first datum surface 167 asimilar to the first datum surface 167 of FIG. 5 for locating on andslidably rotatably mating with the second datum surface 169 of the firstmounting feature 165. In cross section, the first datum surface 167 amay form only a partial circle, wherein at least one portion of acomplete circle that is missing may be that portion which would bedisposed generally at the downstream or leading portion 197 of the firstmounting feature 165 (the missing portion may, for example, be arelatively small portion, e.g., amounting only to a small gap betweenends 199 of the first and second fingers 193, 195, or may be somewhatlarger, e.g., as shown in FIG. 7). The fingers 193, 195 and the commonsupport 196 may, for example, comprise portions of a single componenthaving a continuous, unitary construction.

In response to the force 189, either the first finger 193, the secondfinger 195, or both the first and second fingers 193, 195 may be causedto deform, e.g., either elastically (e.g., in the manner of a spring) orplastically (e.g., in the manner of a sacrificial part that becomes bentor broken and must be replaced), so as to cause the first datum surface167 a (and/or the surface that previously comprised the first datumsurface 167 a prior to the deformation) to demate from the second datumsurface 169 of the first mounting feature 165. Further, the first andsecond fingers 193, 195 and the central support 196 of the firstinterface portion 187, along with the remainder of the article support131 b, may be caused to deflect away from the first mounting feature 165of the conveyor belt 129 a, e.g., in the direction 190 opposite thelongitudinal direction of travel 191 as shown in FIG. 7. As a result,the article support 131 b may be caused to detach entirely from theconveyor belt 129 a.

In additional and/or alternative embodiments, the first mounting feature165 may be compressible such that the first and second fingers 193, 195do not deform or deflect at all in response to the force 189, but thearticle support 131 b may release as a result of compressing the firstmounting feature 165. In some embodiments, the article support 131 b mayrelease in response to the force 189 as a result of both deformation ofthe first and second fingers 193, 195 and compression of the firstmounting feature 165.

Applicants have observed that building such a breakaway feature into thelongitudinally locating first interface portion 187 of the articlesupport 131 b may provide advantages over similar equipment lacking abreakaway feature, such as the avoidance of significant damage, and/orthe limitation of such damage, to precision transport equipment anddelicate in-process workpieces (such as electronic device substrates).For example, the conveyor belt 129 a of the positioning conveyor 127 bmay have been optimized for rotation at relatively high constant speedsin the longitudinal direction 191 of the travel route 103 (e.g., it maybe of relatively light weight), and may exhibit one or more dimensionalaspects of relatively small size (see, e.g., FIG. 6) (e.g., so as toprovide positional and/or orientational precision to conveyed articles,and/or to permit flexure within lateral turns). Moreover, theconsequences of damage to the conveyor belt 129 a, beyond what mayamount to significant costs relating to replacement and/or repair ofwhat may be a delicate and highly-engineered component, could includeinconvenient and costly factory downtime in the form otherwise properlyfunctioning processing stations standing idle, or becomingunderutilized, due to a failure (or slowdown) in delivery of workpieces.

The inventive breakaway feature described above may effectively isolatethe conveyor belt 129 a from damage from the force of a frontal impactwith an item or person in the travel route 103, and may limit suchdamage as may occur to the affected conveyed article (not shown) and/orthe affected article support 131 b, and/or one or more similarcomponents following closely behind the affected components, some and/orall of which may be permitted to fall away from the rotatable article129 a under the force of gravity.

FIG. 8 is a partial cross-sectional top view of a positioning conveyor127 c, which is an embodiment of the positioning conveyor 127 of FIGS.2-4, and is similar to the positioning conveyor 127 b of FIG. 7 in thatit includes a breakaway feature for the article support, withdifferences as explained below. Referring to FIG. 8, the positioningconveyor 127 c may comprise a conveyor belt 129 a (FIG. 7), wherein theconveyor belt is also partially schematically illustrated in the form ofits travel route 103 (FIG. 7), and comprises a first mounting feature165. The positioning conveyor 127 c may further include an articlesupport 131 c shown in relevant portion, that portion being a firstinterface portion 201 of the article support 131 c. The first interfaceportion 201 may function and have structure similar to the firstinterface portion 187 of FIG. 7, but with certain differences. Forexample, the first interface portion 201 is similar to the firstinterface portion 187 in that it may comprise a breakaway connection,wherein when urged by a force 189 (e.g., a force created by an impactbetween the article support 131 c passing along the travel route 103(FIG. 7) and a slower object, or a relatively motionless object,crossing into and/or appearing within the travel route 103 (FIG. 7)) ofa predefined magnitude, e.g., 25 pounds force or more, the firstinterface portion 201 is adapted to permit the article support 131 c todeflect away (e.g., in a direction 190 substantially opposite thelongitudinal direction of travel 191 of the conveyor belt 131 c) fromthe first longitudinal location 111 a.

Differences between the first interface portion 201 of FIG. 8 and thefirst interface portion 189 of FIG. 7 at least involve the nature of thefingers and the manner in which they permit the article support 131 c todeflect away from the first longitudinal location 111 a. For example,the first interface portion 201 may be articulated in that it comprisesa first finger 203 and a second finger 205 extending from a commonsupport 207, wherein either or both of the first and second fingers 203,205, rather than flex or deform in response to the force 189, mayinstead rotate relative to the common support 207 so as to permit thearticle support 131 c to deflect away from the first longitudinallocation 111 a. As shown in FIG. 8, such articulation may permit thefirst and second fingers 203, 205 to rotate away from each other, and byso doing, demate from the first mounting feature 165.

As shown in the embodiment shown in FIG. 8, the central support 207 maycomprise a post, and a spring (e.g., a torsional spring such as thespring 209 shown in FIG. 8, or another spring or similar biasing elementof suitable construction) may be disposed at the interface between thefirst finger 203 and the central support 207, and/or at the interfacebetween the second finger 205 and the central support 207, to providethe closure or biasing force necessary for mating (e.g., a springconstant may be selected depending on the preselected magnitude of thedesired breakaway force). In other embodiments, the central support 207may have an extended lateral aspect, each of the first and secondfingers 203, 205 may have separate attachments to the central support207 about which they are adapted to articulate, and separate springs maybe provided to provide the necessary biasing force to close each fingerrelative to the first mounting feature 165.

FIG. 9 is a downward, perspective view of an inventive positioningconveyor 127 d, which is an embodiment of the positioning conveyor 127of FIGS. 2-4. The positioning conveyor 127 d is also similar to thepositioning conveyor 127 a of FIG. 5, for example in that thepositioning conveyor 127 d comprises a conveyor belt 129 b that issubstantially incompressible, as well as substantially inextensible, inthe direction 105 (FIG. 5) of travel of the conveyor belt 129 b alongthe travel route 103 (FIG. 5). And whereas the positioning conveyor 127d of FIG. 9 is different from the positioning conveyor 127 a of FIG. 5in that a first interface portion 211 of the article support 131 c ofthe positioning conveyor 127 d comprises a breakaway connection relativeto the first mounting feature 165 of the conveyor belt 129 b (thebreakaway connection functioning, for example, in a similar way to thatof the positioning conveyor 127 b of FIG. 7), other similarities withthe positioning conveyor 127 a of FIG. 5 may exist, such as arediscussed below with reference to FIG. 9.

The conveyor belt 129 b may comprise a belt 183 a, which may be similarto the belt 183 of FIG. 6. For example, the belt 183 a may be longenough to extend in a loop throughout the entire travel route 103 (FIG.5), such that opposite ends of the belt 183 a may be attached to eachother, e.g., via a common attachment to one or more brackets 213 adaptedfor the purpose. The conveyor belt 129 b may further include first andsecond mounting features 165 b, 171 b attached to the belt 183 a, andthe first and second mounting features 165 b, 171 b of the conveyor belt129 b may each comprise at least two pieces.

A first piece 215 and a second piece (not visible) of the first mountingfeature 165 b may be respectively attached to opposite first and secondlateral sides 217, 219 of the belt 183 a so as to form separate butcooperatively functioning segments of a datum surface, e.g., a seconddatum surface 169 a. The second datum surface 169 a, which may be acylindrically shaped embodiment of the second datum surface 169 (seeFIG. 5 and the above description related thereto), may extend upwardalong the belt 183 a so as to exhibit an extended vertical aspect. Suchan extended vertical aspect for the second datum surface 169 a may, forexample, be advantageous for distributing inertial loads in the form ofroll moments 149 (see also FIG. 2 and the description relating thereto)along a vertical axis. As shown in FIG. 9, such a vertical axis maycomprise the first longitudinal location 111 a (see also FIG. 5 and theabove description related thereto) of the conveyor belt 129 b.

A first piece 221 and a second piece (not visible) of the secondmounting feature 171 b may be respectively attached to the first andsecond lateral sides 217, 219 of the belt 183 a so as to form separatebut cooperatively functioning segments of a datum surface, e.g., a fifthdatum surface 177 a. The fifth datum surface 177 a, which may be acylindrically shaped embodiment of the fifth datum surface 177 shown inand described with reference to FIGS. 5 and 7, may extend upward alongthe belt 183 a so as to exhibit an extended vertical aspect. Such anextended vertical aspect for the fifth datum surface 177 a may, forexample, be advantageous for distributing inertial loads in the form ofroll moments 149 (see also FIG. 2 and the description relating thereto)along a vertical axis. As shown in FIG. 9, such a vertical axis maycomprise the second longitudinal location 113 a (see also FIG. 5 and theabove description related thereto) of the conveyor belt 129 b.

Lowermost extents (e.g., a lowermost extent 223 of the first piece 221of the second mounting feature 171 b) of the first and second pieces ofthe first and second mounting features 165 b, 171 b may be disposed atthe same elevation as a lowermost extent 225 of the belt 183.Alternatively, the lower extents of the first and second pieces of themounting features may be disposed at a relatively higher elevation(e.g., a slightly higher elevation), or at a relatively lower elevation(e.g., as shown in FIG. 6).

The first interface portion 211 of the article support 131 c may includea central support 227 attached (e.g., fixedly attached) to a support 159a of the article support 131 c (from which a conveyed substrate carrier(not shown) may depend), and which may have a transversely extendingportion 228 that passes laterally beneath the lowermost extent 225 ofthe belt 183 a, so as to provide support on both sides of the belt 183a. The central support 227 of the first interface portion 211 may alsohave a first vertically extending portion 229 extending upward along thefirst lateral side 217 of the belt 183 a, and a second verticallyextending portion (obscured) extending upward along the second lateralside 219 thereof.

The first interface portion 211 may also include a first finger 193,similar to the first finger 193 of the first interface portion 187 ofFIG. 7, which may extend longitudinally from the first verticallyextending portion 229 and peripherally around the first mounting feature165 b of the conveyor belt 129 b. The first finger 193 may be ofunitary, continuous construction with the first vertically extendingportion 229, and may thereby provide the spring force necessary topermit a first datum surface (obscured) of the finger to remain matedwith the second datum surface 169 a of the first mounting feature 165 bduring normal operation, and to allow the first finger 193 to flexoutward, and thus demate from the first mounting feature 165 b (see alsoFIG. 7 and related description), for example, when urged to so flex by afrontal force 189 (FIG. 7) of a magnitude (e.g., 25 pounds force)predetermined to trigger such a breakaway. The first interface portion211 may also include a second finger (obscured) (e.g., of which thefirst datum surface may also form a part) and a second verticallyextending portion (obscured) adapted to function in the same or asimilar manner on the second lateral side 221 of the belt 183 a.

The article support 131 c may also include a second interface portion163 a which may be an embodiment of the second interface portion 163 ofthe article support 131 a of FIG. 5. For example, the second interfaceportion may include a central support 231 attached (e.g., fixedlyattached) to the support 159 a of the article support 131 c, and whichmay have a transversely extending portion 233 that passes laterallybeneath the lowermost extent 225 of the belt 183 a, so as to providesupport on both sides of the belt 183 a. The central support 231 of thesecond interface portion 163 a may also have a first verticallyextending portion 235 extending upward along the first lateral side 217of the belt 183 a, and a second vertically extending portion (obscured)extending upward along the second lateral side 221 thereof. The firstvertically extending portion 235 and the second vertically extendingportion (obscured) may respectively comprise third and fourth datumsurfaces (obscured) adapted to locate on the fifth datum surface 177 aof the second mounting feature 171 b of the conveyor belt 129 b. Forexample, the third and fourth datum surfaces (obscured) may comprisesubstantially planar surfaces adapted to smoothly interface with asubstantially cylindrically shaped fifth datum surface 177 a of thesecond mounting feature 171 b as illustrated in FIG. 9.

As mentioned above with respect to FIG. 5, interaction between the firstdatum surface 167 (of the first interface portion 161 of the articlesupport 131 a) and the second datum surface 169 (of the first mountingfeature 165 of the conveyor belt 129 a), and/or interaction between thethird and fourth datum surfaces 173, 175 (of the second interfaceportion 163 of the article support 131 a) and the fifth datum surface177 (of the conveyor belt 129 a), may include weight force transmission(e.g., so that the force of weight is passed from the article support131 a to the conveyor belt 129 a). As shown in FIG. 9, and as alluded toearlier, such weight force transmission may be accomplished in adifferent manner.

As shown in FIG. 9, where cylindrical shapes for the first datum surface(obscured) and the second datum surface 169 a are oriented substantiallyvertically, such surfaces may be essentially isolated from the functionof weight force transmission. For example, the first mounting feature165 b may comprise a first weight bearing surface 237 on the firstlateral side 217 of the conveyor belt 129 b. The first weight bearingsurface 237 may face upward (e.g., may be planar (and horizontallyoriented or inclined, or curved or conical) so as to permit acomplementary surface 239 of one or more transversely extending tabs 241of the first interface portion of the article support 131 c to rest onthe first weight bearing surface 237, and to permit conveyor belt 129 bto bear a weight of the conveyed article (not shown) and/or a weight ofthe conveyed article/article support subassembly at the firstlongitudinal location 111 a. Optionally, the second mounting feature 171b may comprise a second weight bearing surface 243 on the first lateralside 217 of the conveyor belt 129 b. The second weight bearing surface243 may face upwards (e.g., may be planar (e.g., horizontally orientedor inclined), or curved or conical) so as to permit a complementarysurface 245 of one or more transversely extending tabs 247 of the secondinterface portion 163 a of the article support 131 c to rest on thesecond weight bearing surface 237, and to permit the conveyor belt 129 bto bear a weight of the conveyed article (not shown) and/or a weight ofthe conveyed article/article support subassembly at the secondlongitudinal location 113 a. For example, the first and second mountingfeatures 165 b, 171 b may share the burden of a total weight of the samein a longitudinally distributed fashion, and sliding-rotational contact(e.g., at the first longitudinal location 111 a), and/or slidingrotational and translational contact (e.g., at the second longitudinallocation 113 a) may be permitted between the weight bearing surfaces andthe complementary surfaces of the tabs as necessary (e.g., becauserelative rotation and/or translation between the longitudinal locations111 a, 113 a must be allowed). Similar weight bearing surfaces andtransversely extending tabs may be provided on the second lateral side219 of the conveyor belt 129 b, e.g., so as to provide laterallybalanced support.

As described above, dislodgement of the article support 131 c of FIG. 9from the conveyor belt 129 b may be provided at least in part by thebreakaway connection formed between the finger/s 193, 195 and the firstmounting feature 165 b. Control may be exerted over such a dislodgment,e.g., as described below.

The first interface portion 211 of the article support 131 c may furtherinclude a guide surface 249 (e.g., a planar surface, a curved surface,etc.) disposed below the first mounting feature 165 b of the conveyorbelt 129 b, and the first mounting feature 165 b may include acomplementary surface (obscured) that permits longitudinally slidingcontact with the guide surface 249 of the first interface portion 211.In the event the article support 131 c, (e.g., in the process of alongitudinally oriented dislodgement from the conveyor belt 129 b) isurged upward toward the conveyor belt 129 a, the guide surface 249 ofthe first interface portion 211 may achieve contact with thecomplementary surface (obscured) of the first mounting feature 165 b(e.g., preventing the article support 131 c from moving furtherupwardly). A slot 251 (e.g., a longitudinally oriented slot) may thus beformed at the first longitudinal location 111 a on the first lateralside 217 of the conveyor belt 129 b between opposing surfaces 239, 249of the first interface portion 211 of the article support 131 c, and theslot 251 may be employed to channel movement of the article support 131c relative to the conveyor belt 129 b along the longitudinal direction(e.g., at least until the fingers 193 have demated from the firstmounting feature 165 b, and the article support 131 c may be allowed tofall away from the conveyor belt 129 b). Similar paired surfaces and/ormovement control slots may be provided as necessary/as desired on thesecond lateral side of the conveyor belt 129 b at the first longitudinallocation 111 a, and/or on either or both lateral sides 217, 219 of theconveyor belt 129 b at the second longitudinal location 113 a.

Turning to FIGS. 10A and 10B, a specific embodiment of the presentinvention is now described in detail. FIG. 10A depicts an example of aportion of a conveyor belt 1000. The particular example portion depictedis long enough to transport two small lot substrate carriers 1002approximately 500 mm apart from each other.

In some embodiments, the methods and apparatus of the present inventionmay simultaneously use two different couplings 1004,1006 to mount acradle 1008 onto the conveyor belt 1000. The first coupling 1004 mayaccommodate rotational forces applied to the cradle 1008 by the conveyorbelt 1000 as the conveyor belt 1000 bends through turns on a transportpath (not pictured). In some embodiments, the first coupling 1004 mayinclude a support bearing 1010 rigidly attached to the cradle 1008 andadapted to be rotatably carried by a key 1012 rigidly attached to theconveyor belt 1000.

The second coupling 1006 may accommodate longitudinal forces applied tothe cradle 1008 by the conveyor belt 1000 as it bends and the length ofconveyor belt 1000 between the two couplings 1004,1006 increases. Thesecond coupling 1006 may include a support bearing, such as thelongitudinal slide bearing 1014 depicted in FIGS. 10A and 10B, rigidlyattached to the cradle 1008 and adapted to provide a channel withinwhich a second key 1016 rigidly attached to the conveyor belt 1000 isfree to move longitudinally while carrying the cradle 1008. In someembodiments, one or more additional couplings may be used for a givensupport. In alternative and/or additional embodiments, the firstcoupling 1004 may be used as a lead coupling as the cradle 1008 movesalong the transport path. In other embodiments, the second coupling 1006may be used as the lead coupling as the cradle 1008 moves along thetransport path.

In alternate and/or additional embodiments, the couplings 1004,1006 maybe break-away couplings. In such embodiments, if the cradle 1008 (or asubstrate carrier 1002 held by the cradle 1008) unexpectedly encountersan obstruction, the couplings 1004,1006 may controllably (e.g., in apredictable direction) release the cradle 1008 such that the amount offorce applied to the conveyor belt 1000 as a result of the collision islimited to a predetermined amount of break-away force that will notdamage the conveyor belt 1000 or drive system. In some embodiments, thepredefined amount of force may be approximately 25 pounds of force.Other break-away forces may be used.

In one or more embodiments, the bearing 1010 of the first coupling 1004may be a spring and/or clip bearing that rotatably attaches to the key1012 but releases the key 1012 (through deformation of the springsand/or compression of the key 1012) if more than the predeterminedamount of break-away force is applied in the longitudinal direction.Since the second coupling 1006 does not restrict the movement of thecradle 1008 in the longitudinal direction, the second coupling 1006 mayallow controlled release the cradle 1008 by having the slide bearing1014 limited in length to the minimum length required to accommodate thesharpest (e.g., smallest radius) bends that the conveyor belt 1000 willnormally be required to accommodate. Thus, mounts that use break-awaycouplings 1004,1006 according to the present invention may prevent theconveyor belt 1000 from stopping or being damaged in the case of acollision between cradles 1008 (or substrate carriers 1002 suspendedfrom the cradles 1008) mounted on the conveyor belt 1000 and otherobjects.

Note that in the example of FIG. 10A, there are two locations 1018,1020for mounting a cradle 1008. The location 1018 on the left side of FIG.10A does not have a cradle 1008 mounted while the location 1020 on theright side of FIG. 10A includes a mounted cradle 1008 supporting anexample of a small lot substrate carrier 1002. The difference betweenthe left side and right side of FIG. 10A represents the differencebetween a mounted cradle 1008 with a supported carrier 1002 (on theright side) and an empty mounting location 1018 (on the left side) inwhich, e.g., a cradle (not pictured) may have been dislodged using thebreak-away feature of the present invention. Note the example of amounting location 1018 includes two keys 1022,1024 spaced appropriatelyto engage bearing fixtures 1010,1014 on a cradle 1008.

In contrast to FIG. 10A, FIG. 10B depicts the same example portion of aconveyor belt 1000, however, the cradle 1008 in the right location 1020is not supporting a substrate carrier 1002 as is the cradle in the rightlocation 1020 of FIG. 10A. This difference represents the differencebetween a loaded cradle and an unloaded cradle.

As with the example of FIG. 10A, the example in FIG. 10B depicts twolocations 1018,1020 for mounting a cradle. The location 1018 on the leftside of FIG. 10B does not have a cradle mounted while the location 1020on the right side of FIG. 10B includes a mounted cradle 1008. As withFIG. 10A, the difference between the left side and right side of FIG.10B represents the difference between a mounted cradle 1008 (on theright side) and a mounting location 1018 (on the left side) in which acradle (not pictured) may have been dislodged using the break-awayfeature of the present invention.

Thus, in normal operation, the cradle 1008 provides a means to supportsubstrate carriers 1002 that are loaded and unloaded at processing tools(not pictured). In contrast, the couplings 1004,1006 or mounts hold thecradles 1008 on the conveyor belt 1000 unless a collision causes acradle 1008 to become dislodged or the conveyor system was initiallyconfigured without a cradle 1008 at each mounting location 1018. Thus,in some configurations, not all mounting locations 1018 will have acradle 1008 mounted.

The mounting locations (e.g., 1018,1020) in the example embodiment ofFIGS. 10A & 10B each include a pair of keys 1012,1016 and 1022,1024 orvertical dowels that are each bisected by the conveyor belt 1000. Thekeys 1012,1016 may be rigidly attached to the conveyor belt 1000 at apredefined distance apart from each other and at a predefined distancefrom other key pairs 1022,1024. In the specific example depicted, thekeys 1012,1016,1022,1024 are attached to the conveyor belt 1000 usingtwo through bolts but could alternatively and/or additionally be mountedusing different fasteners, adhesives, and/or other methods such as,e.g., welding. In additional and/or alternative embodiments, keys may bedifferent from each other to accommodate and/or engage different typesof bearings.

Turning to FIG. 11, a perspective drawing depicting an exampleembodiment of a key 1100 (or vertical dowel) is provided. A key 1100 mayinclude load bearing surfaces 1102, attachment surfaces 1104, reliefsurfaces 1106, and position bearing surfaces 1108. In some embodiments,a key suitable for use with the present invention may be made ofultra-high molecular weight (UHMW) plastic, stainless steel, or aluminumand be approximately 1.25 inches high and 1.2 inches in diameter.However, other materials and dimensions that are practicable may beused. Note that, keys made from UHMW may be compressible and allow theuse of rigid or semi-rigid clip arms on the rotatable bearings.

A load bearing surface 1102 in the example of FIG. 11 is the flat,horizontal, top surface of the key 1100 which is where the bearings1010,1014 attached to the cradle 1008 are supported. To reliably supportthe weight of a cradle 1008 and a substrate carrier 1002, an appropriateamount of area of a load bearing surface 1102 for a key 1100 such asdepicted in FIG. 11 would be 0.125 square inches. However, otherdimensions that are practicable may be used. An attachment surface 1104in the example of FIG. 11 is the flat vertical surface that contacts theconveyor belt (not shown). A relief surface 1106 in the example of FIG.11 is the flat vertical surface adjacent the attachment surface 1104that does not contact the conveyor belt 1000. A position bearing surface1108 in the example of FIG. 11 is the curved vertical surfaced shaped toengage a collar or spring arms of a rotatable bearing or to slide in achannel of a longitudinal bearing. In addition, a key 1100, as indicatedabove, may include one or more through holes 1110 and spacers 1112 forattaching the key 1100 to a conveyor belt 1000 using fasteners 1114. Akey 1100 may also include one or more beveled surfaces 1116 included toeliminate sharp edges that may chip or otherwise snag on the surfaces ofthe bearings 1010,1014.

In the example embodiment of FIG. 11, a key 1100 is depicted that has aminimized attachment surface 1104, both horizontally (i.e.,longitudinally along the length of the conveyor belt) and vertically(i.e., along the height of the conveyor belt). By minimizing thehorizontal dimension of the attachment surface 1104, the conveyor belt1000 can make tighter turns (i.e., have a smaller bend radius) along thetransport path. Thus, for a given bend radius there is a maximumhorizontal dimension of the attachment surface 1104 that will not induceappreciable stress on the conveyor belt 1000. For example, for aconveyor belt 1000 made of polyurethane or spring stainless steel (e.g.,austenitic 17-7) with a bend radius of twenty-four inches, the maximumhorizontal dimension of the attachment surface 1104 would beapproximately 0.25 inches. However, other materials and dimensions thatare practicable may be used. Further, depending on the materials used,the horizontal dimension of the attachment surface 1104 may need to belarge enough to provide sufficient surface area to accommodate whateverfastening method is employed to rigidly attach the key 1100 to theconveyor belt 1000. For example, the horizontal dimension of theattachment surface 1104 may need to be large enough to allow the use ofa particular gage fastener which is needed to support a portion of theweight of a cradle and loaded substrate carrier.

As with the horizontal dimension of the attachment surface 1104, thevertical dimension may need to be large enough to provide sufficientsurface area to accommodate whatever fastening method is employed torigidly attach the key 1100 to the conveyor belt 1000. Further, whilethe vertical dimension of the attachment surface 1104 may not need to bereduced to accommodate the minimum bend radius, it may need to beincreased to meet a minimum amount of lateral support requirement. Forexample, the preferred amount of lateral swing of a substrate carrier ona positioning conveyor is zero. Thus, the vertical dimension of theattachment surface 1104 is preferably large enough to prevent anylateral motion of the cradle relative to the conveyor belt. For example,for a conveyor belt made of polyurethane, the minimum vertical dimensionof the attachment surface 1104 would be approximately 1.25 inches.However, other materials and dimensions that are practicable may beused.

A relief surface 1106 may be a flat or curved surface that angles orslopes away from the attachment surface 1104 at an angle θ so as toavoid any contact with the conveyor belt 1000 even in the tightest ofbends (smallest bend radius) in the transport path. For example, in someembodiments wherein the smallest bend radius is approximatelytwenty-four inches, the angle θ would be approximately seven degrees.Both halves of the key 1100 may include two relief surfaces 1106 (e.g.,a leading and a trailing relief surface 1106). Other bend radius valuesand/or angles θ may be used.

A position bearing surface 1108 may be shaped to mate with a supportbearing 1010,1014 attached to a cradle 1008. The position bearingsurface 1108 may be shaped to mate with both a rotatable support bearing1010 and/or a longitudinal slide support bearing 1014. In someembodiments, keys 1100 may have different position bearing surfaces 1108depending on the type of support bearing with which they are to mate.

Turning to FIG. 12, a cradle 1008 with an example embodiment of aleading rotatable support bearing 1010 and a trailing longitudinal slidesupport bearing 1014 is shown. Note that the example leading rotatablesupport bearing 1010 includes two spring arms 1200 for coupling to a key1100 and the trailing longitudinal slide support bearing 1014 includes achannel 1202 or slot for receiving a key 1100.

Turning to FIGS. 13A through 13D, perspective, side, front, and topviews (respectively) of the example rotatable support bearing 1010 ofFIG. 12 are depicted with the example key of FIG. 11 inserted in thespring arms 1200 of the bearing 1010. In some embodiments, a rotatablesupport bearing 1010 suitable for use with the present invention may bemade of ultra-high molecular weight (UHMW) plastic, spring stainlesssteel, and/or aluminum and be approximately 1.5 inches high and 1.5inches wide. However, other materials and dimensions that arepracticable may be used. Note that a simplified representation of theexample key 1100 is used in these figures and the relief surfaces 1106are not discernable.

FIGS. 13E through 13H also provide perspective, side, front, and topviews (respectively) of the example rotatable support bearing 1010 ofFIG. 12 but without the example key 1100 inserted. Note that to moreclearly illustrate the bearing 1010 and how the key 1100 fits into therotatable support bearing 1010, the conveyor belt 1000 is not depictedin these figures but would normally fit in the slot 1300 bisecting boththe key 1100 and bearing 1010. Also note, as shown in the drawings butmost clearly in FIGS. 13B and 13D, that at least a portion 1302 of therotatable support bearing 1010 overhangs the top of the key 1100 andrests on the load bearing surface 1102 of the key 1100. To reduceparticle generation from surfaces in contact, the amount of overhang1302 in contact with the load bearing surface 1102 may be minimized toprovide just enough support sufficient to carry half the weight of acradle 1008 and a loaded substrate carrier 1002 (in a two bearingembodiment). Also as shown in the drawings but most clearly in FIG. 13D,the spring arms 1200 extend more than 180 degrees around the key 1100 soas to rotatably but securely couple the bearing 1010 to the key 1100.

Turning to FIGS. 14A through 14D2, perspective, side, front, top, andsecond top views (respectively) of the example longitudinal slidesupport bearing 1014 of FIG. 12 are depicted with the example key 1100of FIG. 11 inserted in the slide channel 1202 of the bearing 1014. Insome embodiments, a longitudinal slide support bearing 1014 suitable foruse with the present invention may be made of UHMW plastic, springstainless steel, and/or aluminum and be approximately 1.5 inches highand 1.5 inches wide. However, other materials and dimensions that arepracticable may be used. Note that a simplified representation of theexample key 1100 is used in these figures and the relief surfaces 1106are not discernable.

FIGS. 14E through 14H also provide perspective, side, front, and topviews (respectively) of the example longitudinal slide support bearing1014 of FIG. 12 but without the example key 1100 inserted in the slidechannel 1202. Note that to more clearly illustrate the bearing 1014 andhow the key 1100 fits into the longitudinal slide bearing 1014, theconveyor belt 1000 is not depicted in these figures but would normallyfit in the slot 1400 bisecting both the key 1100 and bearing 1014. Asshown in the drawings but most clearly in FIGS. 14D1 and 14D2, the key1100 can move through a range of positions. In FIG. 14D1, the key 1100is in the forward most position relative to the longitudinal slidebearing 1014. In FIG. 14D2, the key 1100 is moved back relative to thelongitudinal slide bearing 1014. Thus, FIG. 14D1 corresponds to a keyposition that may occur when the conveyor belt 1000 is experiencing themaximum bend (e.g., during the smallest radius turn in the transportpath) and the distance between the two keys 1012,1016 is foreshortenedby the maximum amount. FIG. 14D2 corresponds to a key position that mayoccur when the conveyor belt 1000 is straight and the keys 1012,1016 areat their maximum distance.

Looking at FIGS. 14D1 and 14D2, note that as with the rotatable supportbearing 1010, at least a portion 1402 of the longitudinal slide supportbearing 1014 overhangs the top of the key 1100 and rests on the loadbearing surface 1102 of the key 1100. To reduce particle generation fromsurfaces in contact, the amount of overhang 1402 that contacts the loadbearing surface 1102 may be minimized to provide just enough supportsufficient to carry half the weight of a cradle 1008 and a loadedsubstrate carrier 1002 (in a two bearing embodiment).

Turning to FIG. 15, an example embodiment illustrating a cradle 1508with alternative support bearings 1510,1514 is depicted. The alternativerotatable support bearing 1510 includes a signal flag 1522 with avertical slot 1524 to permit the use of a light sensor to accuratelydetermine the location of the substrate carrier (not pictured). Thealternative longitudinal slide bearing 1514 includes a signal flag 1520to permit the use of a light sensor to determine the presence of thecradle 1508.

The foregoing description discloses only particular embodiments of theinvention; modifications of the above disclosed methods and apparatuswhich fall within the scope of the invention will be readily apparent tothose of ordinary skill in the art. For instance, though the conveyorbelts shown in FIGS. 6 and 9 exhibit relatively extended verticalaspects as well as relatively narrow transverse aspects, it is notnecessary to the present invention that the conveyor belt of thepositioning conveyor have any particular lateral or transverse aspect.Further, though many of the conveyor belts discussed and illustratedabove are described as being substantially incompressible and/orinextensible in the longitudinal direction, e.g., via a continuouslongitudinal construction, a segmented or linked (e.g., articulated)aspect in the longitudinal direction may also be provided in accordancewith some and/or all embodiments of the present invention. Also, atleast some embodiments of the present invention provide for travelplanes not necessarily oriented horizontally (e.g., lateral turns in thetravel route are inclined and/or perpendicular to the horizontal). Stillfurther, embodiments of the present invention may provide for thedistribution among different longitudinal locations of inertial momentsin pitch (see moment 151 in FIG. 9), as well as in roll (e.g., thethird, fourth and fifth datum surfaces associated with the secondlongitudinal location 113 a (see, e.g., FIG. 9)). Interlocking and/orundulative curved surfaces may be employed for such a purpose, and/orfor guiding a longitudinal dislodgement (as described above).

In alternate and/or additional embodiments, only a single coupling,including a rotational bearing, may be used in conjunction with arotation restriction element to mount the cradle to the conveyor belt.In such an embodiment, the rotational bearing may be positioned abovethe center of gravity of the cradle so that the rotational bearing bearsall of the weight of the cradle and any attached substrate carrier. Therotation restriction element may extend longitudinally away (forwardand/or backward) from the rotational bearing on either side of theconveyor belt. In some embodiments, the rotation restriction element mayextend upward from the cradle (forward and/or aft of the rotationalbearing) on either side of the conveyor belt. Such rotation restrictionelements may operate to limit the amount of rotation of the rotationalbearing to an amount proportional to the bend in the conveyor belt.

In alternate and/or additional embodiments, additional couplings may beemployed per cradle to support heavy carriers. In such embodiments, thecradle may include one or more joints to allow the cradle to flex withbends in the conveyor belt.

In yet other alternate and/or additional embodiments, cradles mayintentionally be removed from, and/or inserted on, the conveyor beltwithout stopping the conveyor belt. In some embodiments, a removal tool,adapted to securely engage a cradle while it is moving, may pull acradle off the conveyor belt by applying controlled force in thedirection opposite of the direction of motion of the cradle. In someembodiments, the amount of force employed to remove the cradle may beapproximately 25 pounds.

An insertion tool may be used to engage a cradle on the conveyor beltwithout stopping the conveyor belt. An insertion tool moves a cradle tobe mounted along with the conveyor belt at a speed faster than that ofthe conveyor belt. While still moving along with the conveyor belt, thecradle is raised between two mounting positions (wherein the leadingmounting position does not have a cradle mounted) so that the conveyorbelt threads through the bearings of the cradle. Once the cradle catchesup to the available cradle mounting position, sufficient force isapplied to engage the keys with the bearings. Once engaged, the toolreleases the cradle to be carried away by the conveyor belt.

In some embodiments, removal and insertion tools may be implemented as asingle tool capable of the two functions. Removal and insertion ofcradles, without stopping the conveyor belt, further allows componentsof the system to be maintained without having to stop production in anelectronic device manufacturing facility employing the presentinvention.

It will be understood that the invention also may be employed with anytype of substrates such as a silicon substrate, a glass plate, a mask, areticule, etc., whether patterned or unpatterned; and/or with apparatusfor transporting and/or processing such substrates.

Accordingly, while the present invention has been disclosed inconnection with specific embodiments thereof, it should be understoodthat other embodiments may fall within the spirit and scope of theinvention, as defined by the following claims.

1. A method comprising: locating a substrate carrier on a longitudinallocation of a conveyor belt of a positioning conveyor; moving theconveyor belt along a travel route; and distributing inertial loadsarising in the conveyed substrate carrier along multiple longitudinallocations of the conveyor belt so as to limit an occurrence of fatiguewithin the conveyor belt. 2.-7. (canceled)
 8. A method comprising:transporting a substrate carrier on a support cradle, the support cradlebeing mounted to a conveyor via an accommodating mount adapted to limitan occurrence of fatigue within the conveyor belt; and attaching anddetaching the substrate carrier to/from the support cradle withoutstopping the conveyor.
 9. The method of claim 2 wherein theaccommodating mount includes a rotatable bearing attachable to a firstkey which is attached to the conveyor belt, the rotatable bearing beingadapted to accommodate rotational forces applied to the support cradleby the conveyor belt.
 10. The method of claim 3 wherein theaccommodating mount includes a slide bearing attachable to a second keywhich is attached to the conveyor belt, the slide bearing being adaptedto accommodate longitudinal forces applied to the support cradle by theconveyor belt.
 11. The method of claim 2 further comprising detachingthe support cradle from the conveyor belt in response to a predeterminedmagnitude of force.
 12. The method of claim 11 wherein the predeterminedmagnitude of force is intentionally applied in order to remove thesupport cradle from the conveyor belt.
 13. The method of claim 11wherein the predetermined magnitude of force is unintentionally applied.14. The method of claim 2 further comprising deflecting the supportcradle from the conveyor belt in response to a predetermined magnitudeof force.
 15. The method of claim 11 or 14 wherein the predeterminedmagnitude of force is greater than or about 25 pounds.
 16. A system forcontinuously conveying articles through a transport path within afabrication facility comprising: a conveyor belt; a transport pathadapted to have at least one bend; and a support cradle adapted to beattached to the conveyor belt, wherein the support cradle is adapted tosupport a substrate carrier, and wherein the support cradle is adaptedto maintain a fixed position and orientation relative to at least onepoint on the conveyor belt without inducing appreciable stress on anyone of the conveyor belt, the support cradle, and a coupling between theconveyor belt and the support cradle.
 17. The system of claim 16 furtherincluding a rotatable bearing of the support cradle adapted to becoupled to a first key, the first key being adapted to attach to theconveyor belt, the rotatable bearing being adapted to accommodaterotational forces applied to the support cradle by the conveyor belt.18. The system of claim 17 further including a slide bearing of thesupport cradle being adapted to couple to a second key, the second keyadapted to attach to the conveyor belt, the slide bearing being adaptedto accommodate longitudinal forces applied to the support cradle by theconveyor belt.
 19. The system of claim 16 further including a slidebearing of the support cradle being adapted to couple to a first key,the first key being adapted to attach to the conveyor belt, the slidebearing being adapted to accommodate longitudinal forces applied to thesupport cradle by the conveyor belt.
 20. The system of claim 19 furtherincluding a rotatable bearing of the support cradle adapted to becoupled to a second key attached to the conveyor belt, the rotatablebearing being adapted to accommodate rotational forces applied to thesupport cradle by the conveyor belt.
 21. The system of claim 16 whereinthe substrate carrier is adapted to be detached from the support cradleon the conveyor belt.
 22. The system of claim 16 wherein the supportcradle is adapted to be detached from the conveyor belt in response to apredetermined magnitude of force.
 23. The system of claim 16 wherein thesupport cradle is adapted to be deflected from the conveyor belt inresponse to a predetermined magnitude of force.
 24. The system of claim22 or 23 wherein the predetermined magnitude of force is greater than orabout 25 pounds.
 25. A system for continuously conveying articlesthrough a transport path within a fabrication facility comprising: aconveyor belt having a longitudinal direction of travel; at least onemounting location on the conveyor belt including at least two keys; anda support including at least a rotatable bearing and a slide bearing,each bearing adapted to engage either key, wherein the support may bemounted on the conveyor belt at the mounting location by engaging thekeys with the bearings, wherein the support is operative to deflect awayfrom the longitudinal direction of travel in response to a predeterminedamount of force applied to the support.
 26. An apparatus comprising: aconveyor belt having a longitudinal direction of travel; at least onemounting location on the conveyor belt including at least two keys; anda support including at least a rotatable bearing and a slide bearing,each bearing adapted to engage either key, wherein the support may bemounted on the conveyor belt at the mounting location by engaging thekeys with the bearings, wherein the support is operative to deflect awayfrom the longitudinal direction of travel in response to a predeterminedamount of force applied to the support.
 27. A coupling interface forattaching an article support to a conveyor belt of a conveying system,comprising: a mounting feature located on a conveyor belt of a conveyingsystem at a longitudinal location of the conveyor belt; a rotationrestriction element in contact with the conveyor belt; and a rotatablecoupling element adapted to be attached to an article support, adaptedto locate on the longitudinal location of the conveyor belt by matingwith the mounting feature, adapted to be limited in an amount ofrotation by the rotation restriction element, and adapted to demate fromthe mounting feature by moving longitudinally relative to the mountingfeature when urged by a sufficiently large frontal impact.